Applications of Aerosol Technologies in the Silicon Industry

Author

Miguel Vazquez Pufleau, Washington University in St. LouisFollow

Abstract

In this dissertation, the focus was on two unit operations that have the potential to significantly lower the cost and energy required for refining silicon. First, the removal of carbon from silicon kerf (sawing dust from wafering) was examined to enable its recycling. Second, silane pyrolysis was studied to better understand the dynamics of the initial stages of silicon aerosol formation and growth.

Committee Chair

Pratim Biswas, Elijah Thimsen

Committee Members

Richard Axelbaum, Marcus Foston, Alexis Grabbe, Gregory Yablonsky

Comments

Permanent URL: https://doi.org/10.7936/K79K48N7

Degree

Doctor of Science (DSc)

Author's Department

Energy, Environmental & Chemical Engineering

Document Type

Dissertation

Date of Award

Winter 12-15-2016

Language

English (en)

Author's ORCID

https://orcid.org/0000-0001-6836-5098