Abstract
In this dissertation, the focus was on two unit operations that have the potential to significantly lower the cost and energy required for refining silicon. First, the removal of carbon from silicon kerf (sawing dust from wafering) was examined to enable its recycling. Second, silane pyrolysis was studied to better understand the dynamics of the initial stages of silicon aerosol formation and growth.
Committee Chair
Pratim Biswas, Elijah Thimsen
Committee Members
Richard Axelbaum, Marcus Foston, Alexis Grabbe, Gregory Yablonsky
Degree
Doctor of Science (DSc)
Author's Department
Energy, Environmental & Chemical Engineering
Document Type
Dissertation
Date of Award
Winter 12-15-2016
Language
English (en)
DOI
https://doi.org/10.7936/K79K48N7
Author's ORCID
https://orcid.org/0000-0001-6836-5098
Recommended Citation
Vazquez Pufleau, Miguel, "Applications of Aerosol Technologies in the Silicon Industry" (2016). McKelvey School of Engineering Theses & Dissertations. 212.
The definitive version is available at https://doi.org/10.7936/K79K48N7
Comments
Permanent URL: https://doi.org/10.7936/K79K48N7