Abstract

Describes a project to automate a atomic deposition layer system and couple a quadruple mass spectrometer to the atomic layer deposition graphic user interface to bring in the data acquisition under an integrated user platform.

Document Type

Final Report

Author's School

School of Engineering and Applied Science

Author's Department

Mechanical Engineering and Materials Science

Class Name

Mechanical Engineering and Material Sciences Independent Study

Date of Submission

5-3-2016

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