Abstract

To study acoustic microfluidic particle manipulation, a microfluidic channel was designed in Autocad and fabricated in a silicon wafer using potassium hydroxide etching and other cleanroom techniques. The first channel created was destructively tested and its fabrication techniques characterized; future channel development is outlined.

Document Type

Final Report

Author's School

School of Engineering and Applied Science

Author's Department

Mechanical Engineering and Materials Science

Class Name

Mechanical Engineering and Material Sciences Independent Study

Date of Submission

5-11-2016

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